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单词 Ultrapure water
释义

Ultrapure water

中文百科

超纯水

超纯水(Ultrapure_water)极为接近高纯度的水,即除了氢离子与氢氧离子,几乎没有任何其他电解质存在的水。在制造处理过程后能尽可能将溶在水中或在水中散播的各种杂质除去,包含像是 有机物、细菌、尘埃、氧化物 等任何物质。

根据半导体产业的发展,随着制程的开发,使得晶圆线路更加细致,所使用的清洗用水,也需要更加提升。为了介于以往的纯水名称,故命名为超纯水。 电阻率约达到18.2MΩ.cm,依据电子行业超纯水标准,还有很多其他的指标要求。

英语百科

Ultrapure water 超纯水

Ultrapure Water System Validation Process Flow[13]
Typical ultrapure water purification configuration in a semiconductor plant
Relationship between ultrapure water flow and wafer size
Outline for a typical water system in a semiconductor plant

Ultrapure water (also UPW or high-purity water) is water that has been purified to uncommonly stringent specifications. Ultrapure water is a commonly used term in the semiconductor industry to emphasize the fact that the water is treated to the highest levels of purity for all contaminant types, including: organic and inorganic compounds; dissolved and particulate matter; volatile and non-volatile, reactive and inert; hydrophilic and hydrophobic; and dissolved gases.

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更新时间:2025/6/17 23:22:02