薄膜电阻具有均匀厚度薄膜电阻的量度。通常被用作评估半导体掺杂的结果。这种工艺的例子有：半导体的掺杂领域（比如硅或者多晶硅），以及被丝网印刷到薄膜混合微电路基底上的电阻。薄膜电阻的概念与电阻或者电阻率相对，可直接用四端点测量技术测量法（也称为四点探针测量法）来测量。

薄膜电阻用欧姆/平方来计量，可被应用于将薄膜考虑为一个二维实体的二维系统。它与三维系统下所用的电阻率的概念对等。当使用到薄膜电阻一词的时候，电流必须沿着薄膜平面流动，而非与其垂直。

对于常规三维导体，电阻可被写为

其中代表电阻率，代表截面面积而代表长度。截面面积可被分解为宽度和薄膜厚度。

Sheet resistance is a measure of resistance of thin films that are nominally uniform in thickness. It is commonly used to characterize materials made by semiconductor doping, metal deposition, resistive paste printing, and glass coating. Examples of these processes are: doped semiconductor regions (e.g., silicon or polysilicon), and the resistors that are screen printed onto the substrates of thick-film hybrid microcircuits.