纳机电系统（英语：Nanoelectromechanical systems，简称NEMS）与 微机电系统（MEMS）概念相似，不过尺度更小。他们承诺具有革命性的能力去测量小到分子尺度的位移和力，并且与纳米科技密切相关。

有两种研究途径被研究者视为标准的NEMS研究方法。一种方法，自上而下，可以总结为“用一套工具来制作一套更小的工具”。例如，一个用毫米量级的工厂制作出来微米量级的工具，可以用来制作纳米量级的器械。另一种方法自下而上，可以被认为是组装原子和分子，使之达到期间所要求的复杂度和功能。这种过程可能用到自组装或分子生物系统。

Nanoelectromechanical systems (NEMS) are a class of devices integrating electrical and mechanical functionality on the nanoscale. NEMS form the logical next miniaturization step from so-called microelectromechanical systems, or MEMS devices. NEMS typically integrate transistor-like nanoelectronics with mechanical actuators, pumps, or motors, and may thereby form physical, biological, and chemical sensors. The name derives from typical device dimensions in the nanometer range, leading to low mass, high mechanical resonance frequencies, potentially large quantum mechanical effects such as zero point motion, and a high surface-to-volume ratio useful for surface-based sensing mechanisms. Uses include accelerometers, or detectors of chemical substances in the air.