Microelectromechanical systems

Proposal submitted to DARPA in 1986 first introducing the term

MEMS microcantilever resonating inside a scanning electron microscope

Microelectromechanical systems chip, sometimes called

A Texas Instruments DMD chip for cinema projection

Microelectromechanical systems (MEMS, also written as micro-electro-mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems and the related micromechatronics) is the technology of very small devices; it merges at the nano-scale into nanoelectromechanical systems (NEMS) and nanotechnology. MEMS are also referred to as micromachines in Japan, or micro systems technology (MST) in Europe.

单词	Microelectromechanical System
释义	Microelectromechanical System 英语百科 Microelectromechanical systems Microelectromechanical systems (MEMS, also written as micro-electro-mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems and the related micromechatronics) is the technology of very small devices; it merges at the nano-scale into nanoelectromechanical systems (NEMS) and nanotechnology. MEMS are also referred to as micromachines in Japan, or micro systems technology (MST) in Europe.
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Microelectromechanical System

Microelectromechanical systems