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单词 LIGA
释义

LIGA

英语百科

LIGA

The X-ray LIGA process was originally developed at the Forschungszentrum Karlsruhe, Germany, to produce nozzles for uranium enrichment.
SEM picture of an ant carrying a LIGA micro gear. This picture made the cover of Scientific American Magazine in November 1992 (G. Stix, Scientific American 267, 5 (1992)).
SEM picture of a polymer LIGA structure made by moulding. Smallest polymer width is 6µm; polymer height is 120µm, the aspect ratio is, therefore, 20.
SEM picture of a polymer LIGA structure made by x-ray lithography. Step length is 3µm, step height is 0.7µm. The pattern extends downwards towards the substrate for 150µm leading to an aspect ratio of the contour of 200.

LIGA is a German acronym for Lithographie, Galvanoformung, Abformung (Lithography, Electroplating, and Molding) that describes a fabrication technology used to create high-aspect-ratio microstructures.

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更新时间:2025/6/17 10:28:59