电感耦合等离子体
电感耦合等离子体（英语：Inductively Coupled Plasma，缩写：ICP）是一种通过随时间变化的磁场电磁感应产生电流作为能量来源的等离子体源。
如图2，总共有三种不同的ICP供能装置。
Inductively coupled plasma
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Inductively coupled plasma 电感耦合等离子体
An inductively coupled plasma (ICP) or transformer coupled plasma (TCP) is a type of plasma source in which the energy is supplied by electric currents which are produced by electromagnetic induction, that is, by time-varying magnetic fields.
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