Electron microprobe

（重定向自Electron probe microanalyser）

A Cambridge Scientific Instrument Company

A section of the 1886VE10 microcontroller die as seen by an electron microprobe. The small bright cylinders are tungsten vias left over from a metalization etching process. The X-ray spectroscopy technique can be used to determine the material composition of the vias.

For comparison purposes, a similar section of the 1886VE10 microcontroller die as seen by an optical microscope.

An electron microprobe (EMP), also known as an electron probe microanalyzer (EPMA) or electron micro probe analyzer (EMPA), is an analytical tool used to non-destructively determine the chemical composition of small volumes of solid materials. It works similarly to a scanning electron microscope: the sample is bombarded with an electron beam, emitting x-rays at wavelengths characteristic to the elements being analyzed. This enables the abundances of elements present within small sample volumes (typically 10-30 cubic micrometers or less) to be determined. The concentrations of elements from beryllium to plutonium can be measured at levels as low as 100 parts per million (ppm). Recent models of EPMAs can accurately measure elemental concentrations of approximately 10 ppm.

单词	Electron probe microanalyser
释义	Electron probe microanalyser 英语例句库 The cross section morphology and skin-core structure of PAN fiber in wet-spinning are analyzed by the means of electron probe microanalyser (EPMA) and scanning electron microscope (SEM). 结果表明凝固浴温度会影响初生纤维的横截面形貌与芯部结构。英语百科 Electron microprobe （重定向自Electron probe microanalyser） An electron microprobe (EMP), also known as an electron probe microanalyzer (EPMA) or electron micro probe analyzer (EMPA), is an analytical tool used to non-destructively determine the chemical composition of small volumes of solid materials. It works similarly to a scanning electron microscope: the sample is bombarded with an electron beam, emitting x-rays at wavelengths characteristic to the elements being analyzed. This enables the abundances of elements present within small sample volumes (typically 10-30 cubic micrometers or less) to be determined. The concentrations of elements from beryllium to plutonium can be measured at levels as low as 100 parts per million (ppm). Recent models of EPMAs can accurately measure elemental concentrations of approximately 10 ppm.
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